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Predictive Simulation of Semiconductor Processing: Status and Challenges -

inglise keel
2004-05-05
223,60 € 372,66 €

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Saadetis 17-23 tööpäeva jooksul

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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth d ... Täielik kirjeldus

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Kirjeldus

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Lisateave

Kirjastaja Springer Berlin Heidelberg
Series Springer Series in Materials Science
Väljalaskeaasta 2004
Kaanetüüp Kõvakaaneline
EAN 9783540204817
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Te vaatate: Predictive Simulation of Semiconductor Processing: Status and Challenges
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223,60 € 372,66 €