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Process development for nanostructuring and 3D micro/nanointegration - Tobias Senn

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2015-01-05
44,81 € 74,69 €

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Saadetis 12-18 tööpäeva jooksul

30-päevane tagastamisõigus

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall pa ... Täielik kirjeldus

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Kirjeldus

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

Lisateave

Autor Tobias Senn
Kirjastaja Südwestdeutscher Verlag für Hochschulschriften
Väljalaskeaasta 2015
Kaanetüüp Pehme kaanega
EAN 9783838150284
Kirjuta oma arvustus
Te vaatate: Process development for nanostructuring and 3D micro/nanointegration
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44,81 € 74,69 €