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Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models
Evgenii B. Rudnyi, Jan G. Korvink, Tamara Bechtold
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Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models
Jan G. Korvink, Tamara Bechtold, Evgenii B. Rudnyi
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