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Interfacial Compatibility in Microelectronics: Moving Away from the Trial and Error Approach
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Interfacial Compatibility in Microelectronics: Moving Away from the Trial and Error Approach
Mervi Paulasto-Kröckel, Markus Turunen, Vesa Vuorinen, Jorma Kivilahti, Toni T. Mattila, Tomi Laurila
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Handbook of Silicon Based MEMS Materials and Technologies
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